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Linköping Institute of Technology

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Valid for year : 2002
 
NFYD84 Growth of Semiconductors, 7,5 ECTS credits.
/Halvledartillväxt/

For:   Fys  

  Area of Education:

Subject area:

  Advancement level (A-D): D

Aim:
After the invention of the bipolar transistor in 1947, the semiconductor industry has made a tremendous progress. Most of the semiconductor materials when used for application s within microeletronics and power eleectronics are required to be in form of single crystals, both bulk crystals and thin epitaxial layers. Device performances are strongly dependent on the quality of the crystals used. The aim of this course is to provide a general introduction to the fundamental principles of growth of semiconductor materials with properties suitable for dvice fabrications. In addition, some advanced growth techniques wil be demonstrated and the students will have the unique chance to combine theoretical knowledge with a practical implementation.

Prerequisites: (valid for students admitted to programmes within which the course is offered)
Thermodynamics, Material Science, Semiconductors physics.

Note: Admission requirements for non-programme students usually also include admission requirements for the programme and threshhold requirements for progression within the programme, or corresponding.

Organisation:
Lectures 20h and two elaborations.

Course contents:
-Elemantary process of crystal growth, energy of formation of new phases, nucleation. -Growth theories, growth mechanisms. -Driving force for the growth, supersaturation, supercooling. -Mass transport, free molecular flux, diffusion and Stefan flow, convection. -Kinetics, adsorption, desorption, surface diffusion. -relationship between supersaturation, growth macanism and growth rate. -Vapor-solid, liquid-solid phase transformation and different techniques-capability and limitations. -Growth related defects. -Epitaxy. -Examples of growthof modern semiconductor materials, Si,GaAs, GaN and SiC.

Course literature:
A.W. Vere: Chrystal Growth-Principles and Progress (Plenum prtess, New York and London, 1987), Lecture notes.

Examination:
A written examination
5 p
 



Course language is English.
Department offering the course: IFM.
Director of Studies: Magnus Boman
Examiner: Rositza Yakimova
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Course Syllabus in Swedish

Linköping Institute of Technology

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Contact: TFK , val@tfk.liu.se
Last updated: 01/22/2003