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TFYY07 Thin Film Physics, 3,5 p (sw)
/Tunnfilmsfysik/

Advancement level:
D

Aim:
The course will give knowledge on mechanisms and processes for thin film fabrication as well as properties unique for thin films. An orientation of application of thin films will be given with examples from, e.g. semiconductor and engineering industries.

Prerequisites:
TFFY70 Materiefysik, inledande kurs (alternativt: TMKM04 Konstruktionsmaterial, grundkurs or TMKM45 Konstruktionsmaterial I)

Course organization:
Teaching will be provided in the form of lectures, laborative exercises, and visit to industries.

Course content:
Vacuum technology, deposition techniques. Growth, structure, epitaxy, interdiffusion, and reaction of thin films. Mechanical, electrical, and optical properties and application that utalise these properties. New application, present "research frontier". In the course two or three laborations and a visit to a company that utilises thin film technology will be incorporated.

Course literature:
M Ohring, The Materials Science of Thin Films, Academic Press, 1992, ISBN 0-12-524990-X

Course language is english.

 
 

Linköpings tekniska högskola

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Informationsansvarig: Info-LiTH, info-lith@tfk.liu.se
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