| TNE058 |
Semiconductor Technology, 12 ECTS credits.
/Halvledarteknik och tillverkning/
For:
ED
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Prel. scheduled
hours: 108
Rec. self-study hours: 212
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Area of Education: Science
Main field of studies: Applied Physics, Electrical Engineering
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Advancement level
(G1, G2, A): A
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Aim:
The aim of the course is to present the fundamental principle of semiconductor devices and how models of devices can be created from this understanding. How the semiconductor devices are fabricated? Basic unit processes will be presented. The students get the basic knowledge that is necessary to understand, work and produce integrated circuits and optoelectronics. After this course the student should
- Describe manufacturing steps, lithography, oxidation, metallization, and etching.
- Integrate the manufacturing steps for manufacturing of bipolar transistors, MOSFET, CMOS and MEMS.
- Explain the terms, band gap, energy level, mobility, effective mass, charge generation and recombination, doping, drift, diffusion, equilibrium and steady state.
- â?¢ Apply relations between band gap, energy level, mobility, effective mass, charge generation and recombination, doping, drift, diffusion, conductivity, current density, temperature and illumination in semiconductors.
- Calculate and determine the material parameters (band gap, doping, level, carrier lifetime, diffusion length) from electrical characteristics of semiconductor devices.
- Design pn-junctions, Schottky diodes, bipolar transistor, MOSFET, and pn-solar cells having given characteristics.
- Design pn-junctions, Schottky diodes, bipolar transistor, and MOSFET.
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Prerequisites: (valid for students admitted to programmes within which the course is offered)
The students attending this course should have basic knowledge in physics and mathematics. The student should be able to solve system of equations, differential equations and have good knowledge in differential and integral calculus. Student should have basic knowledge in Newtonian mechanics and classical physics, electromagnetism, optics and wave. It is expected that the student have some knowledge from modern physics and can use Shrödinger equation on simple systems
Note: Admission requirements for non-programme students usually also include admission requirements for the programme and threshhold requirements for progression within the programme, or corresponding.
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Supplementary courses:
Solar Cell Technology, Power Electronics,and Charge Transport in Organic and Inorganic Materials, System Design.
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Organisation:
Lectures and tutorial. Laboratory work, Weekly Home assignment , Student oral presentations. Mandatory attendance of some lectures and during student presentations.
The course runs over the entire autumn semester.
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Course contents:
Basic semiconductor physics, concept and mechanisms such as band diagram, valence- and conduction band, Fermi level, Fermi-Dirac statistics, band gap, effective mass, drift, diffusion, doping, intrinsic, extrinsic, electron-hole pair, charge generation and recombination, minority carriers, majority carriers etc. will be discussed thoroughly. Function and modelling of pn-junctions, contact potential, depletion region, and different break down mechanisms for pn-junctions will be explained. Functions and I-V characteristics of some other devices such as MOSFET and bipolar transistors will also be discussed. Basic unit processes such as ion implantation, diffusion, thermal oxidation, annealing, deposition processes such as evaporation, sputtering, CVD, epitaxial growth, fabrication processes such as optical and non-optical lithography, photoresist and etching will be introduced. The students should enter deeply into one of the subjects below and present their work for the whole class. Device isolation, Contacts and metallization, CMOS technology, GaAs technology, bipolar technology and MEMS. Laboratory assignment includes classical labs with diode and transistor measurements.
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Course literature:
1-Jasprit Singh, "Semiconductor Devices, basic principles, Wiley & Sons 2002 ISBN 0-471-36245-X. 2-Introduction to Microfabrication; Sami Franssila, Wiley & Sons (2004) ISBN: 0470-85106-6
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Examination: |
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Written examination
Laboratory work
Assignment, written and oral presentation
Midterm short exam
Optional assignments
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8 ECTS
1 ECTS
1 ECTS
2 ECTS
0 ECTS
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Mandatory attendance during student presentations |
Course language is Swedish/English.
Department offering the course: ITN.
Director of Studies: Adriana Serban
Examiner: Amir Baranzahi
Link to the course homepage at the department
Course Syllabus in Swedish
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