| TFYY86 | Microchip Fabrication, 4,5 ECTS credits. /Mikrochipstillverkning/ |
||
Prel. scheduled
hours: 48 |
|||
|
Area of Education: Technology Subject area: Physics |
|||
| Advancement level
(A-D): D
|
|||
| Aim: This is an engineering course for those who want to get more knowledge about the microfabrication technique of chips and other devices. The course will essentially cover four domains, i.e., starting materials, process flow steps, process integration and simulations, and chip packaging and modules, for microchip production. The main body of the course is Si-based technology. To provide a general overview, however, special technology issues for processing devices based on other materials will also be addressed. |
|||
| Prerequisites: (valid for students admitted to programmes within which the course is offered) The course TFFY 34 Semiconductor Technology is desirable, but not compulsory. Note: Admission requirements for non-programme students usually also include admission requirements for the programme and threshhold requirements for progression within the programme, or corresponding. |
|||
| Organisation: The course is composed of two parts: lectures and laborations. |
|||
| Course contents: General introduction; Starting materials (Crystal growth and wafer preparation, epi-layer growth, and Si on insulator (SOI) technology); Process step flow (Material manipulation using ion implantation and diffusion, rapid thermal process, micropattern transfer, thin film technology and multiple-layer interconnects, and process technologies for compound semiconductor devices); Process integration and process simulation for bipolar and CMOS technology; Chip production (Packaging and chip modules, reliability, and fab construction); MEMS (Micro-electro-mechanical Systems); Summary and out look of future development. |
|||
| Course literature: Introduction to Microelectronic Fabrication, Richard C. Jaeger (Prentice Hall; 2 edition, October 2001). Aother reference: The Science and Engineering of Microelectronic Fabrication, Stephen A. Campbell (Oxford University Press, New York, 2001). |
|||
| Examination: | |||
| Process design assignment. Oral examination Laboratory work |
2,5 p 0,5 p |
||
Course language is English. Department offering the course: IFM. Director of Studies: Leif Johansson Examiner: Quamar ul Wahab Course Syllabus in Swedish |
|||
|
|
 |
|||||
| ||||||